2018 P2 Champion
Global Foundries, Malta, New York
This is Global Foundries’ (GF) third win, demonstrating that their extraordinary commitment to pollution prevention is not limited to one facility. GF has continued their previous award-winning P2 effort at their Vermont facility, yielding significant new advances, and has had extraordinary achievements in New York. From the Malta, New York facility contact Joel Rouillard reports that this semiconductor maker took “aggressive steps” to bring about reuse of sulfuric acid and peroxide mix, (used on silicon wafer substrate to remove organic residue), eliminating over 10,000 tons of hazardous chemical annually, and saving more than $16,700,000 for GF and its partners in this effort, while implementing improvements to manufacturing quality and throughput. (For example, “The processing equipment is required to flush a small amount of chemical to the drain when wafer lots are loaded into a tool for different recipes. By organizing the wafer lots into “groups” of similar process recipes, the team was able to reduce the demand for passive usage based on this requirement…After process equipment has been idle for a specified period of time, the equipment is designed to flush chemical to drain before processing the next wafer lot. By extending this period of time, the team was able to reduce the frequency of passive usage driven by this requirement.” In Vermont, where a chemical mechanical polish process is used to remove a metal or oxide film down to a targeted thickness, efforts to reduce hazardous chemical use have been ongoing for several years. The “slurry” used in the process contains ferric nitrate, hydrogen peroxide, alumina, silica, and various inorganic and organic constituents. Contact Ruma Koli reports that the team optimized the slurry chemistry “to dramatically boost the polish rate, specifically by increasing the oxidizer concentration…the team also qualified a new polishing pad whose checkerboard-groove pattern enhanced slurry transport. Collectively, these changes made the inductor process 33% faster.” GF eliminated 184,000 gallons of hazardous waste and saved $1.13 Million a year. Making the process faster “made it possible to maintain a stable endpoint signal, which made endpoint control viable and eliminated significant slurry waste associated with running to a fixed time”.